Well... I did, but didn't find something called 'Hardware version', you mean the value of the 'Compability' field, which notes VM Version 13 on most (if not, please be more precise where to find it).
Two of them have version 7 (CentOS) and version 11 (Ubuntu, 15.93 GB used space) and both are backed up properly:
CentOS: 2.76 GB used space incl. 361MB host memory; 2,311,094,223 bytes backed up
Ubuntu: 15.93GB used space incl. 3.53GB host memory; 12,822,350,032 bytes backed up
I think I once tried to 'update' vmtools at the Ubuntu server and accidently replaced it instead... it now looks like a problem with the new VM version. But the issue would now be to figure out what has changed so that it works properly...
Thanks for going into the issue.